How to gain access to the Nanofabrication Facility?
Take the mandatory NFF general introduction.
How to gain access to the tools?
1. Schedule an introduction to the tool, through PPMS, with the responsible staff member (see table below).
2. You can gain experience with the tool by joining your labmates in their sample fab or simply ask for help to the NFF staff.
3. Take the practical test, where you will demonstrate your ability to safely and independently operate the tool.
4. Turn-in the corresponding authorization form, signed by your supervisor.
| Tool | Owner | Back up |
| EBPG | Salvo | Juan |
| SEM | Juan | Evgeniia |
| PFIB | Evgeniia | Juan |
| Mask Aligner | Lubuna | Evgeniia |
| Profilometer | Juan | Carola |
| Optical Microscopes | Carola/Evgeniia | Lubuna |
| Plassys HV | Lubuna | |
| Plassys UHV | Juan | Lubuna |
| ICP-Cl | Rodolfo | Juan |
| ICP-F | Rodolfo | Juan |
| ALD | Rodolfo | Juan |
| Ellipsometer | Rodolfo | Juan |
| RTA | Juan | Lubuna |
| Plasma Asher | Evgeniia | Lubuna |
| Vapor HF | Lubuna | Carola |
| Dicing Saw | Rodolfo | Juan |
| Wire Bonder | Juan | Rodolfo |
| DC Probe Station | Juan | Rodolfo |
| Wet Bench (Acids) | Carola | Lubuna |
| Wet Bench (Solvents) | Carola | Lubuna |
| Wet Bench (HF) | Lubuna | Carola |
| Polishing System | Salvo | |
| AFM | Juan | Lubuna |
| PPMS | Lubuna | Juan |
| Desktop Sputtering | Carola | Lubuna |
| HV Sputtering | Lubuna | Evgeniia |
| UHV Sputtering | Rodolfo/Lubuna | |
| 3D Printer | Rodolfo | Lubuna |
| Raman Microscope | Evgeniia | Carola |
Updated 10.10.2024 by JuAg